منابع مشابه
Micro-patterning of NdFeB and SmCo magnet films for integration into Micro- Electro-Mechanical-Systems
The integration of high performance RE-TM (NdFeB and SmCo) hard magnetic films into Micro-Electro-Mechanical-Systems (MEMS) requires their patterning at the micron scale. In this paper we report on the applicability of standard micro-fabrication steps (film deposition onto topographically patterned substrates, wet etching and planarization) to the patterning of 5 μm thick RE-TM films. While NdF...
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ژورنال
عنوان ژورنال: Annals of Surgery
سال: 1920
ISSN: 0003-4932
DOI: 10.1097/00000658-192003000-00016